1

Characterization of focused ion beam induced damage

Year:
1995
Language:
english
File:
PDF, 708 KB
english, 1995
7

Minimizing damage during focused-ion-beam induced desorption of hydrogen

Year:
1999
Language:
english
File:
PDF, 475 KB
english, 1999
9

Thin oxides on passivated silicon irradiated by focused ion beams

Year:
1999
Language:
english
File:
PDF, 493 KB
english, 1999